Fabrication and Characterization of Orthorhombic Epitaxial HfO<sub>2</sub>-based Thin Films

Presentation information

Oral presentation

Code-sharing session » 6.1/9.1 Code-sharing session

Fri. Sep 19, 2014 1:15 PM - 5:45 PM A9 (E208)

2:45 PM - 3:00 PM

^○Takao Shimizu¹, Hiroshi Funakubo^1,2 (Tokyo Inst. Technol. MCES¹, Tokyo Inst. Technol. IGS²)

Keywords:ハフニウム酸化物,強誘電体