[19p-B3-1~16] 17.1 Growth technology

[19p-B3-12] Selective bilayer graphene synthesis by plasma CVD

^○Ryuichi Kato¹, Yuki Okigawa^1,2, Masatou Ishihara^1,2, Takatoshi Yamada^1,2, Masataka Hasegawa^1,2 (TASC¹, AIST NTRC²)

Keywords:2層グラフェン,プラズマCVD