[19p-B3-1~16] 17.1 Growth technology

[19p-B3-9] Thickness dependence of multi-layer graphene synthesis with epitaxial catalysts and its electrical properties

^○Daiyu Kondo^1,2, Haruhisa Nakano¹, Bo Zhou¹, Akiko I¹, Kenjiro Hayashi^1,2, Shintaro Sato^1,2, Naoki Yokoyama^1,2 (AIST¹, Fujitsu Labs²)

Keywords:graphene,配線,CVD