The 75th JSAP Autumn Meeting, 2014

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Poster presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[19p-PA3-1~4] 7.6 Ion beams

Fri. Sep 19, 2014 1:30 PM - 3:30 PM PA3 (Gymnasium1)

ポスター掲示時間13:30～15:30(PA3会場)

1:30 PM - 3:30 PM

[19p-PA3-1] XPS analysis on damage of Si surface induced by argon gas cluster ion beam irradiation(2)

○Ako Miisho1, Shin Takahashi1, Masayuki Inaba1, Syugo Miyake1 (Kobelco Research Institute, Inc.1)

Keywords:XPS,GCIB,Si