1:30 PM - 3:30 PM
[19p-PB2-6] Electrical Characterization of HVPE-GaN films with Ar+ Ion Bombardment
Keywords:GaN,プラズマエッチング,欠陥準位
Presentation information
Poster presentation
14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology
[19p-PB2-1~19] 14.3 Electron devices and Process technology
Fri. Sep 19, 2014 1:30 PM - 3:30 PM PB2 (Gymnasium2)
ポスター掲示時間13:30～15:30(PB2会場)