The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

15. Crystal Engineering » 15.3 III-V-group epitaxial crystals

[19p-PB5-1~16] 15.3 III-V-group epitaxial crystals

Fri. Sep 19, 2014 4:00 PM - 6:00 PM PB5 (Gymnasium2)

ポスター掲示時間16:00~18:00(PB5会場)

4:00 PM - 6:00 PM

[19p-PB5-14] GaSb heteroepitaxy on Si(111) and fabrication of HfO2/GaSb MOS capacitors

Akihiro Ohtake1, Noriyuki Miyata2, Takaaki Mano1, Takahiro Mori2, Tetsuji Yasuda2 (NIMS1, AIST2)

Keywords:ヘテロエピタキシー,MOSキャパシタ