[19p-S10-1~18] 8.4 Plasma etching

[19p-S10-15] Quantitative prediction of neutral beam generation by first-principle calculation

^○Tomohiro Kubota¹, Naoki Watanabe², Shingo Ohtsuka², Takuya Iwasaki², Kohei Ono², Yasuroh Iriye², Seiji Samukawa^1,3 (IFS, Tohoku Univ.¹, Mizuho I&R Inst.², WPI-AIMR, Tohoku Univ.³)

Keywords:中性粒子ビーム,第一原理理論計算,グラファイト