The 75th JSAP Autumn Meeting, 2014

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Oral presentation

08. Plasma Electronics » 8.4 Plasma etching

[19p-S10-1~18] 8.4 Plasma etching

Fri. Sep 19, 2014 2:15 PM - 7:00 PM S10 (S10)

6:15 PM - 6:30 PM

[19p-S10-16] Analysis of Ion Trajectories onto Substrate Surface during Plasma Etching

Nobuya Nakazaki1, ○Soma Sonobe1, Takumi Hatsuse1, Koji Eriguchi1, Kouichi Ono1 (Kyoto Univ.1)

Keywords:plasma etching,コントロールプレート