The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

08. Plasma Electronics » 8.4 Plasma etching

[19p-S10-1~18] 8.4 Plasma etching

Fri. Sep 19, 2014 2:15 PM - 7:00 PM S10 (S10)

6:30 PM - 6:45 PM

[19p-S10-17] Three-Dimensional Atomic-Scale Cellular Model Analysis for Surface Roughening during Plasma Etching

Takumi Hatsuse1, Soma Sonobe1, Nobuya Nakazaki1, Koji Eriguchi1, Kouichi Ono1 (Kyoto Univ.1)

Keywords:plasma etching