Three-Dimensional Atomic-Scale Cellular Model Analysis for Surface Roughening during Plasma Etching

Presentation information

Oral presentation

08. Plasma Electronics » 8.4 Plasma etching

Fri. Sep 19, 2014 2:15 PM - 7:00 PM S10 (S10)

6:30 PM - 6:45 PM

^○Takumi Hatsuse¹, Soma Sonobe¹, Nobuya Nakazaki¹, Koji Eriguchi¹, Kouichi Ono¹ (Kyoto Univ.¹)

Keywords:plasma etching