[19p-S10-1~18] 8.4 Plasma etching

[19p-S10-8] Study of process drift mechanism by metal by-product in Front End of Line (FEOL) process

^○Yoshito Kamaji¹, Masahiro Sumiya¹ (Hitachi High-tech¹)

Keywords:エッチング,メタルクリーニング,MG/HK プロセス