[19p-S10-1~18] 8.4 Plasma etching

△ [19p-S10-9] Instantaneous generation of many flaked particles caused by micro-arc discharge in mass production plasma etching equipment

^○Yuji Kasashima¹, Taisei Motomura¹, Fumihiko Uesugi¹ (AIST¹)

Keywords:プラズマエッチング,パーティクル,異常放電