5:15 PM - 5:30 PM
[19p-S8-15] Silicon Nanowires Growth Using Plasma Sputtering
Keywords:ナノワイヤ,スパッタリング
Presentation information
Oral presentation
08. Plasma Electronics » 8.6 General plasma phenomena, emerging area of plasmas and their new applications
[19p-S8-6~19] 8.6 General plasma phenomena, emerging area of plasmas and their new applications
Fri. Sep 19, 2014 2:45 PM - 6:30 PM S8 (S8)