The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[19p-S9-1~5] 8.3 Plasma deposition of thin film and surface treatment

Fri. Sep 19, 2014 1:15 PM - 2:30 PM S9 (S9)

1:30 PM - 1:45 PM

[19p-S9-2] Plasma Indicator (2)~Plasma diagnostic technique by Plasma Indicator~

Keita Hishikawa1,2, Hirokazu Miyazaki1, Kazuhiro Uneyama1, Hiroshi Inoue1, Osamu Sakai2 (Sakura Color Products Corp.1, Kyoto Univ.2)

Keywords:プラズマ診断,面内分布,インジケータ