[19p-S9-1~5] 8.3 Plasma deposition of thin film and surface treatment

[19p-S9-2] Plasma Indicator (2)～Plasma diagnostic technique by Plasma Indicator～

^○Keita Hishikawa^1,2, Hirokazu Miyazaki¹, Kazuhiro Uneyama¹, Hiroshi Inoue¹, Osamu Sakai² (Sakura Color Products Corp.¹, Kyoto Univ.²)

Keywords:プラズマ診断,面内分布,インジケータ