[20a-A12-1~10] Nanocarbon Technology

[20a-A12-1] Effects of surface morphology of buffer layers on heteroepitaxial growth of single crystalline ZnO films on c-sapphire substrates

^○Naho Itagaki^1,2, Tomoaki Ide¹, Koichi Matsushima¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Kazunori Koga¹, Masaharu Shiratani¹ (Kyushu Univ.¹, JST PRESTO²)

Keywords:酸化亜鉛,スパッタリング,ヘテロエピタキシー