[20a-A13-1~8] 7.4 Nanoimprint

△ [20a-A13-4] Single-nano scale patterning of glass substrate surface by thermal nanoimprint process for novel growth control of thin films

^○Yasuhisa Nozawa¹, Geng Tan¹, Tomoyuki Funabasama¹, Satoru Kaneko^2,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (Tokyo Tech¹, Kanagawa Industrial Technology Center²)

Keywords:熱ナノインプリント,ナノパターニング,グラフォエピタキシー