The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[20a-A13-1~8] 7.4 Nanoimprint

Sat. Sep 20, 2014 9:30 AM - 11:30 AM A13 (E304)

10:30 AM - 10:45 AM

[20a-A13-5] Single-nano patterning on surfaces of glassy materials by thermal nanoimprint

Tomoyuki Funabasama1, Yasuhisa Nozawa1, Geng Tan1, Masahiro Mita2, Satoru Kaneko1,3, Akifumi Matsuda1, Mamoru Yoshimoto1 (Tokyo Inst. of Tech.1, Kyodo Int'l Inc.2, Kanagawa Ind. Tech. Cent.3)

Keywords:熱ナノインプリント,ナノパターン