The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[20a-A13-1~8] 7.4 Nanoimprint

Sat. Sep 20, 2014 9:30 AM - 11:30 AM A13 (E304)

10:45 AM - 11:00 AM

[20a-A13-6] Room temperature nano imprinting of nano porous glass prepared from phase-separated glass

KENJI IMAKITA1, TAKERU KAMATA1, MINORU FUJII1 (Kobe Univ.1)

Keywords:ナノインプリント,ポーラス材料