Fabrication of 3D glass structure by reversal room temperature nanoimprinting

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Sat. Sep 20, 2014 9:30 AM - 11:30 AM A13 (E304)

11:00 AM - 11:15 AM

^○Norihiro Sugano¹, Makoto Okada¹, Yuichi Haruyama¹, Shinji Matsui¹ (Univ. of Hyogo¹)

Keywords:HSQ,3D structure