[20a-A19-1~12] 13.3 Si Process・Interconnect・MEMS・Integration

[20a-A19-5] Improvement in Thermal Efficiency and Uniformity of a Half-inch Wafer in Minimal Focused Light Heating Furnace

^○Noriko Miura¹, Takeshi Aizawa^1,2, Takeshi Yamada^1,2, Yasuhiro Onishi^1,2, Shinichi Ikeda^1,3, Haruki Toonoe¹, Yuuki Ishida^1,3, Takanori Mikahara¹, Katsuhiko Nakato¹, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (MINIMAL¹, YONEKURA², AIST³)

Keywords:ミニマル,熱酸化,加熱炉