The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[20a-A19-1~12] 13.3 Si Process・Interconnect・MEMS・Integration

Sat. Sep 20, 2014 9:00 AM - 12:15 PM A19 (E311)

10:00 AM - 10:15 AM

[20a-A19-5] Improvement in Thermal Efficiency and Uniformity of a Half-inch Wafer in Minimal Focused Light Heating Furnace

Noriko Miura1, Takeshi Aizawa1,2, Takeshi Yamada1,2, Yasuhiro Onishi1,2, Shinichi Ikeda1,3, Haruki Toonoe1, Yuuki Ishida1,3, Takanori Mikahara1, Katsuhiko Nakato1, Sommawan Khumpuang1,3, Shiro Hara1,3 (MINIMAL1, YONEKURA2, AIST3)

Keywords:ミニマル,熱酸化,加熱炉