The 75th JSAP Autumn Meeting, 2014

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15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[20a-A20-1~15] 15.8 Crystal evaluation, impurities and crystal defects

Sat. Sep 20, 2014 9:00 AM - 1:00 PM A20 (E312)

11:45 AM - 12:00 PM

[20a-A20-11] Segregation Gettering of Nickel in p/p+ Silicon Wafers

○Kazuhisa Torigoe1, Toshiaki Ono1, Kozo Nakamura1,2 (SUMCO Corp.1, Okayama Pref. Univ.2)

Keywords:シリコン,ゲッタリング,ニッケル