12:15 PM - 12:30 PM
[20a-A20-13] Effects of Light Element Ion Beam Implantation on Transition Metal Impurities Proximity Gettering in Silicon Wafers (2)
Keywords:炭素,水素,注入,ゲッタリング,シリコン.
Oral presentation
15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects
Sat. Sep 20, 2014 9:00 AM - 1:00 PM A20 (E312)
12:15 PM - 12:30 PM
Keywords:炭素,水素,注入,ゲッタリング,シリコン.