The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[20a-A20-1~15] 15.8 Crystal evaluation, impurities and crystal defects

Sat. Sep 20, 2014 9:00 AM - 1:00 PM A20 (E312)

12:15 PM - 12:30 PM

[20a-A20-13] Effects of Light Element Ion Beam Implantation on Transition Metal Impurities Proximity Gettering in Silicon Wafers (2)

Yoshihiro Koga1, Kazunari Kurita1 (SUMCO Corporation1)

Keywords:炭素,水素,注入,ゲッタリング,シリコン.