12:45 PM - 1:00 PM
[20a-A20-15] Effect of nitrogen concentration in surface layer on the bending strength of silicon wafers
Keywords:シリコンウェーハ,窒素,強度
Oral presentation
15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects
Sat. Sep 20, 2014 9:00 AM - 1:00 PM A20 (E312)
12:45 PM - 1:00 PM
Keywords:シリコンウェーハ,窒素,強度