The 75th JSAP Autumn Meeting, 2014

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16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[20a-A25-6~13] 16.2 Processing technologies and devices

Sat. Sep 20, 2014 10:30 AM - 12:30 PM A25 (E318)

11:30 AM - 11:45 AM

[20a-A25-10] Crystalline silicon germanium films grown on crystalline silicon substrates by solid phase crystallization (2)

○Kojima Yuji1, Isomura Masao1,2 (Tokai Univ., Graduate School of Engineering1, Tokai Univ., Dept. of Electrical and Electronic Engineering2)

Keywords:SiGe,固相成長,Si基板