The 75th JSAP Autumn Meeting, 2014

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Oral presentation

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[20a-A25-6~13] 16.2 Processing technologies and devices

Sat. Sep 20, 2014 10:30 AM - 12:30 PM A25 (E318)

11:45 AM - 12:00 PM

[20a-A25-11] The green laser crystallization of the a-Si:H thin film from liquid source

○masahiro mizoguchi1, takashi masuda1, zhongrong shen1, hideyuki takagishi2, tatsuya shimoda1,2 (JAIST1, JAIST GDRC2)

Keywords:液体シリコン