The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[20a-A25-6~13] 16.2 Processing technologies and devices

Sat. Sep 20, 2014 10:30 AM - 12:30 PM A25 (E318)

12:00 PM - 12:15 PM

[20a-A25-12] The formation of thin poly-Si films on flat glass substrates by flash lamp annealing

○(M2)Taiki Watanabe1, Keisuke Ohdaira1 (JAIST1)

Keywords:フラッシュランプアニール,触媒化学気相成長法,多結晶シリコン