12:15 PM - 12:30 PM
[20a-A25-13] Production mechanism of B atoms and BH radicals from B2H6 on heated W wires
Keywords:ジボラン,ドーピング,Cat-CVD
Oral presentation
16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices
Sat. Sep 20, 2014 10:30 AM - 12:30 PM A25 (E318)
12:15 PM - 12:30 PM
Keywords:ジボラン,ドーピング,Cat-CVD