[20a-B3-1~7] 17.1 Growth technology

[20a-B3-2] Direct CVD synthesis of atomically thin WS₂ on hBN

^○Mitsuhiro Okada¹, Takumi Sawazaki¹, Kenji Watanabe², Takashi Taniguchi², Hisanori Shinohara¹, Ryo Kitaura¹ (Nagoya Univ.¹, NIMS²)

Keywords:遷移金属ジカルコゲナイド,CVD