[20a-PA2-1~11] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[20a-PA2-3] Analysis of Heat Escape Paths in FinFETs Using Phonon Monte Carlo Simulation

^○Indra Nur Adisusilo¹, Kentaro Kukita¹, Go Wakimura¹, Yoshinari Kamakura^1,2 (Osaka Univ.¹, JST CREST²)

Keywords:Monte Carlo,FinFET