Fabrication of Chemical Guide Pattern by thermal Nanoimprinting for Chemoepitaxy of PS-b-PMMA

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Sat. Sep 20, 2014 1:00 PM - 3:00 PM A13 (E304)

1:15 PM - 1:30 PM

^○hitomi wakaba¹, makoto okada¹, syuso iyoshi¹, yuichi haruyama¹, shinji matsui¹ (Univ. of Hyogo¹)

Keywords:自己組織化,ブロックコポリマー