Study of the Relationship between Antisticking Layer Deterioration and Demolding forces on Repeated UV nanoimprint

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Sat. Sep 20, 2014 1:00 PM - 3:00 PM A13 (E304)

1:30 PM - 1:45 PM

^〇Shuso Iyoshi¹, Makoto Okada¹, Yuichi Haruyama¹, Masaru Nakagawa², Hiroshi Hiroshima³, Shinji Matsui¹ (Univ. of Hyogo¹, Tohoku Univ.², AIST³)

Keywords:Uv nanoimprint,Demolding force,Antisticking layer