The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[20p-A13-1~8] 7.4 Nanoimprint

Sat. Sep 20, 2014 1:00 PM - 3:00 PM A13 (E304)

1:45 PM - 2:00 PM

[20p-A13-4] Nanoimprinting without anti-sticking layer by using the resin added fluorosurfactant

Takahiro Oyama1, Tsuneo Yamashita2, Makoto Okada1, Shuso Iyoshi1, Yuichi Haruyama1, Shinji Matsui1 (Graduate School of Material Science, Univ. of Hyogo1, Daikin Industries, Ltd.2)

Keywords:ナノインプリント,フッ素,界面活性剤