[20p-A13-1~8] 7.4 ナノインプリント

[20p-A13-3] Study of the Relationship between Antisticking Layer Deterioration and Demolding forces on Repeated UV nanoimprint

^〇Shuso Iyoshi¹，Makoto Okada¹，Yuichi Haruyama¹，Masaru Nakagawa²，Hiroshi Hiroshima³，Shinji Matsui¹ (Univ. of Hyogo¹，Tohoku Univ.²，AIST³)

キーワード：Uv nanoimprint,Demolding force,Antisticking layer