[20p-A13-1~8] 7.4 Nanoimprint

[20p-A13-4] Nanoimprinting without anti-sticking layer by using the resin added fluorosurfactant

^○Takahiro Oyama¹, Tsuneo Yamashita², Makoto Okada¹, Shuso Iyoshi¹, Yuichi Haruyama¹, Shinji Matsui¹ (Graduate School of Material Science, Univ. of Hyogo¹, Daikin Industries, Ltd.²)

Keywords:ナノインプリント,フッ素,界面活性剤