The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[20p-A13-1~8] 7.4 Nanoimprint

Sat. Sep 20, 2014 1:00 PM - 3:00 PM A13 (E304)

2:15 PM - 2:30 PM

[20p-A13-6] Measurement for Cross Section Profile by Small Angle X-ray Scattering

Kazuhiko Omote1, Yoshiyasu Ito1 (Rigaku Corporation1)

Keywords:ナノ形状計測,X線小角散乱,CD-SAXS