[20p-A13-1~8] 7.4 Nanoimprint

[20p-A13-6] Measurement for Cross Section Profile by Small Angle X-ray Scattering

^○Kazuhiko Omote¹, Yoshiyasu Ito¹ (Rigaku Corporation¹)

Keywords:ナノ形状計測,X線小角散乱,CD-SAXS