[Gx-8] Maintenance Research Corporation

Sputtering Cathodes, Pulse Power Supplies for HIPIMS

[At-9] MEIDENSHA CORPORATION

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[Aop-15] MERITZ SEIKI CO., LTD

Active Pneumatic Vibration Isolation System MRZ seires, Desktop Active Vibration Isolation System ME40 series, Fixing Plates for earthquake- resistance

[At-11] MES AFTY Corporation

Panel（ALD/ECR System introduction）, Film Samples（φ3"～φ8" on Si Wafer）

[Ax-5] TPT Japan Co., Ltd.

[Gm-3] MO SANGYO CO., LTD

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[Av-2] Momentive Performance Materials Japan LLC

PBN Heater, PBN ESC(Electrostatic Chucks), PBN Crucible, Boron Nitride powder, Hot Pressed Boron Nitride, TaC/PBN/PG Coatings, HOPG(highly oriented pyrolytic graphite)

[Gx-12] MORESCO Corporation

[Ax-1] MUSASHI ENGINEERING, INC.

Middle・high viscosity non- contact jet dispenser "AEROJET", Desk-top dispensing robot with PC control image recognition “ 350PC Smart”, High precision parts "Nozzle & Syringe"

[Aa-21] MUSASHINO DENSHI, INC.

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[Aop-13] Mutumi Corporation

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Exhibitors