[17a-D6-1~11] 6.2 Carbon-based thin films

Mon. Mar 17, 2014 9:30 AM - 12:30 PM D6 (D209)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:30 AM - 9:45 AM

[17a-D6-1] Deposition of amorphous isotopic carbon films using physical vapor deposition

^○Yutaro Suzuki¹, Ryo Fujii¹, Naoto Ohtake¹, Hiroki Akasaka¹ (Tokyo Inst. of Tech.¹)

9:45 AM - 10:00 AM

[17a-D6-2] Oxygen analysis of amorphous carbon films with benzene by PECVD

^○Xiaolong Zhou¹, Keiji Komatsu¹, Ikumi Toda¹, Shigeo Ohshio¹, Hiroyuki Muramatsu¹, Haruhiko Ito¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

10:00 AM - 10:15 AM

△ [17a-D6-3] Structural change of hydrogenated amorphous carbon films using rf plasma CVD with application of pulsed bias voltage

^○Xiaolong Zhou¹, Keiji Komatsu¹, Ikumi Toda¹, Shigeo Ohshio¹, Hiroyuki Muratsu¹, Haruhiko Ito¹, Hidetoshi Saitoh¹ (Nagaoka Nniv. Tech.¹)

10:15 AM - 10:30 AM

[17a-D6-4] Quantification of hydrogen in DLC with glow discharge optical emission spectroscopy

^○Hikari Takahara^1,2, Ryoya Ishigami³, Kenji Kodama¹, Atsushi Kojyo¹, Keisuke Yasuda³, Tatsuya Nakamura², Yoshihiro Oka² (Rigaku. Corp.¹, University of Hyogo², WERC³)

10:30 AM - 10:45 AM

[17a-D6-5] Impedance frequency characteristic of amorphous carbon film having different optical properties

Hisashi Yoshioka¹, Xiaolong Zhou¹, Yasuyuki Nakaya¹, Satoru Arakawa¹, Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, ^○Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Break 10:45〜11:00 (10:45 AM - 11:00 AM)

11:00 AM - 11:15 AM

[17a-D6-6] Alkali resistance of hydrogenated amorphous carbon films synthesized by electron cyclotron resonance-chemical vapor deposition method

Yasushi Sasaki¹, ^○Yasuyuki Nakaya¹, Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ.Tech.¹)

11:15 AM - 11:30 AM

[17a-D6-7] Acid resistance of hydrogenated amorphous carbon films under bias voltage evaluated by surface plasmon resonance phenomenon

^○Yasuyuki Nakaya¹, Keiji Komatsu¹, Ikumi Toda¹, Shigeo Ohshio¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

11:30 AM - 11:45 AM

[17a-D6-8] Raman characterization and mechanical properties of a-C:H films deposited by rf-PECVD

^○Tunmee Sarayut¹, Yasuyuki Nakaya¹, Xiaolong Zhou¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

11:45 AM - 12:00 PM

△ [17a-D6-9] The change of refractive index and extinction coefficient of hydrogenated DLC films by the soft X-ray irradiation

^○Ryo Imai¹, Kengo Kidena¹, Akihiro Fujimoto², Noriaki Toyoda², Kazuhiro Kanda¹ (LASTI, Univ. of Hyogo¹, Grad. School of eng., Univ. of Hyogo²)

12:00 PM - 12:15 PM

[17a-D6-10] Evaluation of Adhesion Properties of Hard Carbon Coating with Friction Test

^○Tsuguyori Ohana¹, Hiroki Mano¹, Takako Nakamura¹ (AIST¹)

12:15 PM - 12:30 PM

▲ [17a-D6-11] All carbon solarcell by microwave surface wave plasma CVD

^○Dilip Chandra Ghimire¹, Sudip Adhikari¹, Susumu Ichimura¹, Hideo Uchida¹, Koichi Wakita¹, Masayoshi Umeno¹ (Electrical and Electronics¹)