9:00 AM - 9:15 AM
○Kyohei Masuda1, Shinpei Ogawa2,3, Yosuke Takagawa1, Koichi Miyashita1, Masafumi Kimata1 (Ritsumeikan Univ.1, Mitsubishi Electric Corp.2, NMES Technology Research Org.3)
Oral presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
Tue. Mar 18, 2014 9:00 AM - 11:45 AM E14 (E302)
△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation
9:00 AM - 9:15 AM
○Kyohei Masuda1, Shinpei Ogawa2,3, Yosuke Takagawa1, Koichi Miyashita1, Masafumi Kimata1 (Ritsumeikan Univ.1, Mitsubishi Electric Corp.2, NMES Technology Research Org.3)
9:15 AM - 9:30 AM
○Koji Oishi1, Daisuke Akai2, Makoto Ishida1,2 (Toyohashi Tech.1, EIIRIS2)
9:30 AM - 9:45 AM
○Kazuki Oe1, Shota Yonemaru1, Koji Oishi1, Daisuke Akai1,2, Makoto Ishida1,2 (Toyohashi Tech.1, EIIRIS2)
9:45 AM - 10:00 AM
○Halubai Sekhar1, Tomohiro Kubota1, Van Toan Nguyen2, Takahito Ono2, Seiji Samukawa1,3 (IFS, Tohoku Univ.1, Graduate School of Engineering, Tohoku Univ.2, WPI-AIMR, Tohoku Univ.3)
10:00 AM - 10:15 AM
○Yu Yoshino1, Takehiko Senoo1, Kunihiko Koike1, Toshio Seki2, Takaaki Aoki2, Jiro Matsuo2 (Iwatani Corp.1, Kyoto Univ.2)
Break 10:15〜10:30 (10:15 AM - 10:30 AM)
10:30 AM - 10:45 AM
○Reo Kometani1, Kazuhiro Nakano1, Sunao Ishihara1, Shinichi Warisawa1 (The Univ. of Tokyo1)
10:45 AM - 11:00 AM
○Rakesh Chand1, Masayoshi Esashi2, Shuji Tanaka1 (Tohoku Univ.1, Tohoku Univ., AIMR2)
11:00 AM - 11:15 AM
○Yoshihiro Masuya1, Kazuhiro Takahashi1,2, Ryo Ozawa1, Takeshi Hizawa1, Makoto Ishida1, Kazuaki Sawada1,2 (Toyohashi Univ. of Tech1, JST-CREST2)
11:15 AM - 11:30 AM
○Ryota Ohashi1, Kazuhiro Takahashi1,2, Makoto Ishida1, Kazuaki Sawada1,2 (Toyohashi Univ. of Tech.1, JST-CREST2)
11:30 AM - 11:45 AM
○Mayu Aoki1, Futoshi Furuta1, Kazuyuki Hozawa1, Yuko Hanaoka1, Kenichi Takeda1 (Hitachi1)