Oral presentation
13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration
Thu. Mar 20, 2014 9:00 AM - 11:45 AM E14 (E302)
△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation
9:00 AM - 9:15 AM
○Kohei Takei1, Yasuhiro Shikahama1, Hiroki Yamashita1, Hiroki Kosugiyama1, Shuichiro Hashimoto1, Jing Sun1, Takashi Matsukawa2, Meishoku Masahara2, Takanobu Watanabe1 (Waseda Univ.1, AIST2)
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9:15 AM - 9:30 AM
○Haruo Iwatsu1, Toshiyuki Matsumoto1, Tomohisa Hoshino1 (TOKYO ELECTRON LIMITED1)
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9:30 AM - 9:45 AM
○Satomi Tajima1, Toshio Hayashi1, Kenji Ishikawa1, Makoto Sekine1, Minoru Sasaki2, Koji Yamakawa3, Masaru Hori1 (Nagoya Univ.1, Toyota Tech. Inst.2, Katagiri Engineering, Co., Ltd.3)
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9:45 AM - 10:00 AM
○Taewoong Kim1, Takeshi Momose1, Yukihiro Shimogaki1 (University of Tokyo1)
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10:00 AM - 10:15 AM
Hisashi Takamizawa1, Yasuo Shimizu1, ○Koji Inoue1, Fumiko Yano1,2, Yasuyoshi Nagai1, Yorinobu Kunimune3, Masao Inoue3, Akio Nishida3, Masahiro Ikeda3 (IMR, Tohoku Univ.1, Tokyo City Univ.2, Renesas Electronics Corp.3)
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Break 10:15〜10:30 (10:15 AM - 10:30 AM)
10:30 AM - 10:45 AM
○Akira Heya1, HIrano Shota1, Fumito Kusakabe1, Naoto Matsuo1, Kazuhiro Kanda2 (Dept. Mat. Sci. Chem. Univ. of Hyogo1, LASTI Univ. of Hyogo2)
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10:45 AM - 11:00 AM
○Yi Chen1, Takasi Noguti1 (UNIVERSITY OF THE RYUKYUS1)
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11:00 AM - 11:15 AM
○（D）Lien Mai1, Susumu Horita1 (JAIST1)
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11:15 AM - 11:30 AM
○Keisuke Yamamoto1, Masatoshi Mitsuhara2, Keisuke Hiidome3, Ryutaro Noguchi3, Minoru Nishida2, Dong Wang2, Hiroshi Nakashima1 (Kyushu Univ. KASTEC1, Kyushu Univ. I-EggS2, Kyushu Univ. I-EggS3)
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11:30 AM - 11:45 AM
○Takao Marukame1, Masahiko Yoshiki1, Yoshifumi Nishi1, Koichi Kato1, Yuichiro Mitani1 (Toshiba R&D center1)
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