Session information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[20p-E14-1~4] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Mar 20, 2014 1:15 PM - 2:15 PM E14 (E302)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

Lunch 11:45〜13:15 (11:45 AM - 1:15 PM)

1:15 PM - 1:30 PM

^○Koichi Kato¹, Takao Marukame¹, Yoshifumi Nishi¹, Yuichiro Mitani¹ (Toshiba R&D Cent.¹)

1:30 PM - 1:45 PM

^○Hiroshi Oka¹, Yuya Minoura¹, Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (Osaka Univ.¹)

1:45 PM - 2:00 PM

^○Yosuke Mori¹, Takahiro Suzuki¹, Chikako Takato², Masanori Hayase¹ (Tokyo Univ. Sci.¹, Ebara Corp.²)

2:00 PM - 2:15 PM

kazuhiro harada¹, arito ogawa¹, ^○hiroshi ashihara¹, jiro yugami¹ (Hitachi Kokusai Electric Inc.¹)