[20p-E2-1~6] 17.1 Growth technology

Thu. Mar 20, 2014 1:15 PM - 2:45 PM E2 (E102)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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Lunch 12:15〜13:15 (12:15 PM - 1:15 PM)

1:15 PM - 1:30 PM

△ [20p-E2-1] Effects of Plasmas on the Growth of Graphene Nanoribbon from Nickel Nanobar

^○Hiroo Suzuki¹, Toshiaki Kato¹, Toshiro Kaneko¹ (Dept. of Electronic Eng., Tohoku Univ.¹)

1:30 PM - 1:45 PM

▼ [20p-E2-2] Conductive DLC Film Deposition by Low Temperature Neutral Beam Enhanced Chemical Vapor Deposition

^○Xijiang Chang¹, Yoshiyuki Kikuchi^1,2, Masanori Nakano³, Kumi Inoue^3,4, Tomokazu Matsue^3,4,5, Toshihisa Nozawa², Seiji Samukawa^1,5 (IFS, Tohoku Univ.¹, Tokyo Electron Limited², Graduate School of Environmental Studies, Tohoku Univ.³, microSIC, Tohoku Univ.⁴, WPI-AIMR, Tohoku Univ.⁵)

1:45 PM - 2:00 PM

△ [20p-E2-3] Nano-carbon material synthesis from amorphous carbon source using Heat Beam annealing method

^○Ken Takahara¹, Kazuyuki Ito¹, Yuji Awano¹ (Keio Univ.¹)

2:00 PM - 2:15 PM

[20p-E2-4] Comparing Characteristics of Graphene Films Grown by Surface Wave Assisted Microwave Plasma CVD using Camphor and Methane Precursors.

^○Hare Ram Aryal¹, Madhu Kayastha¹, Hideo Uchida¹, Koichi Wakita¹, Masayoshi Umeno¹ (Chubu Univ.¹)

2:15 PM - 2:30 PM

[20p-E2-5] Initial growth observation of plasma CVD graphene

^○Ryuichi Kato¹, Yuki Okigawa^1,2, Masatou Ishihara^1,2, Takatoshi Yamada^1,2, Masataka Hasegawa^1,2 (TASC Graphene Division¹, AIST NTRC²)

2:30 PM - 2:45 PM

△ [20p-E2-6] Optical microscopy of CVD growth of graphene using black-body radiation

^○Tomoo Terasawa¹, Koichiro Saiki^1,2 (Univ. of Tokyo¹, Univ. of Tokyo²)