The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[17a-D6-1~11] 6.2 Carbon-based thin films

Mon. Mar 17, 2014 9:30 AM - 12:30 PM D6 (D209)

9:30 AM - 9:45 AM

[17a-D6-1] Deposition of amorphous isotopic carbon films using physical vapor deposition

○Yutaro Suzuki1, Ryo Fujii1, Naoto Ohtake1, Hiroki Akasaka1 (Tokyo Inst. of Tech.1)

Keywords:アモルファス炭素,同位体効果