[17a-D6-1~11] 6.2 Carbon-based thin films

[17a-D6-2] Oxygen analysis of amorphous carbon films with benzene by PECVD

^○Xiaolong Zhou¹, Keiji Komatsu¹, Ikumi Toda¹, Shigeo Ohshio¹, Hiroyuki Muramatsu¹, Haruhiko Ito¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Keywords:アモルファス炭素膜,ベンゼン,酸素分析