[17a-D6-1~11] 6.2 Carbon-based thin films

[17a-D6-6] Alkali resistance of hydrogenated amorphous carbon films synthesized by electron cyclotron resonance-chemical vapor deposition method

Yasushi Sasaki¹, ^○Yasuyuki Nakaya¹, Shigeo Ohshio¹, Keiji Komatsu¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ.Tech.¹)

Keywords:表面プラズモン共鳴(SPR)法,水素化アモルファス炭素膜,耐アルカリ性