[17a-D6-1~11] 6.2 Carbon-based thin films

[17a-D6-8] Raman characterization and mechanical properties of a-C:H films deposited by rf-PECVD

^○Tunmee Sarayut¹, Yasuyuki Nakaya¹, Xiaolong Zhou¹, Ikumi Toda¹, Hiroyuki Muramatsu¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Keywords:アモルファス炭素膜,厚さ,機械特性