The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[17a-E10-1~11] Nanocarbon Technology

Mon. Mar 17, 2014 9:00 AM - 12:00 PM E10 (E204)

11:30 AM - 11:45 AM

[17a-E10-10] NO gas effect of ZnO films fabricated by MOCVD method for N doping

○(PC)Yoshitomo Harada1, Jianyu Wang1, Takashi Sekiguchi1, Toyohiro Chikyo1, Setsu Suzuki2, Masatomo Sumiya1 (NIMS1, COMMET2)

Keywords:酸化亜鉛,有機金属気相成長法,NOガス