Influence of Oxygen Partial Pressure Ratio on RF Sputtered ZnO Thin Films

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Mon. Mar 17, 2014 9:00 AM - 12:00 PM E10 (E204)

9:15 AM - 9:30 AM

^○Dai Abe¹, Tatsuya Mori², Hiroshi Chiba², Syuhei Okuda², Tomoyuki Kawashima^1,2, Katsuyoshi Washio^1,2 (Tohoku Univ¹, Tohoku Univ²)

Keywords:酸化亜鉛,マグネトロンスパッタ法,Ar/O2