Helicon-Wave-Excited-Plasma Sputtering Epitaxy of ZnO films using the hydrothermal ZnO target (2)

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Mon. Mar 17, 2014 9:00 AM - 12:00 PM E10 (E204)

10:00 AM - 10:15 AM

^○Kentaro Furusawa^1,2, Hayato Nakasawa^1,2, Yoichi Ishikawa¹, Masanori Tashiro¹, Shigefusa Chichibu^1,2 (Tohoku Univ.¹, Tohoku Univ.²)

Keywords:半導体,結晶成長